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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Manor, United States
Available date: Currently Available
Software: Envision 2.0-068
Main Chamber - Fixed Gap ESC - Metal Etch
ESC - Anodized Aluminum
VAT 65 Pressure Controller
Leybold Mag1500 High Temp Turbo
PLL - DSQ Strip Chamber
APM - Atmospheric passivation
Heated Paddle (1)
Orbital Weld Gas Box
(3) - Unit UFC 1200A
(1) - Unit 1661 Multiflow
(3) - Horiba Z500
(1) - Horiba Z300
(1) - Tylan VC-4900VRH
Lam Harmonic arm drives (2)
Dry Pumps:
Busch BA100 (1)
Edwards iQDP80 (1)
Edwards iQDP80 w/Leybold WSU501 Blower (1)
Chillers:
M and W Single Ch TCU - RPCX28A-3.OHE-RNB
Remote AC Box
Ecosys 3500 Ultra Wet scrubber
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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