Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. (MSTI)
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PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2014-05-08
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Haltom City, United States
Available date: Currently Available
PSG Deposition
Software: 4.433
Chuck Type/Material: Aluminum
Endpoint system
CSM NV6 TEOS cabinet
2 Porter 2000s, 11 Horiba 500s
Novellus C1 standard robot
Dry Pumps:
1 Edwards IXH1210, 1 Edwards IQDP80
Edwards Atlas Abatement
Damaged/Missing Parts:
Down Hard (PM7 controller)
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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