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Alliance (A6) TCP 9400DSiE III
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2012-12-31
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Manor, United States
Available date: Currently Available
Transport Module / TCP9400DSiE III Modules for Deep Silicon Etch
Software: A4.1-019c
PM2 - TCP9400DSiE III - Deep Si Etch
PM3 - TCP9400DSiE III - Deep Si Etch
PM4 - TCP9400DSiE III - Deep Si Etch
ESC - Ceramic
Mobi Gas Box
PM2 - (8) - Brooks GF125
PM3 - (8) - Brooks GF125
PM3 - (8) - Brooks GF125
Brooks Automation Mag 7
Dry Pumps:
Busch DS80 Cobra (3)
Busch BA100 (2)
Chillers:
TCU - Edwards 40/80 Plus (3)
(2) MKS Cold Traps on foreline above pump
RPM - Voltage SAG Enhanced
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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