Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2004-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
DIFFUSION 11-3TEL_A303I_NIT_01OX TEL 303I OXYNIT
Tool config is based on original PO, please verify tool details at tool inspection
For TEL Furnace, Pressure Gauge, Exhaust controller, Quartz, Dry pumps and customer provided items not included on tool sales
General Specification
Safety Specification: S2-0200/ CE-Mark(STD)
Heater Model: FTP VOS-56-003 4Zone / RT-1000(C ) /with RCU
Process Condition: LP
Maximum Operating Temperature C: 950
ART Control: N/A
N2 Load Lock: YES
Wafer Type: 300mm-Si SEMI STD-Notch
Qty. of Production Wafers: 100
Boat Operation (Handing Position): 2 Boat Type
Software Version (WAVES): Ver 2.13 (WAVES)
Furnace Spec, Furnace
Dewpoint Meter for N2 Load Lock: None
RCU Duct Length FNC - RCU: N/A
Ionizer Maker / Model: ION system / 4052e(controller):4610TF(ionizer)
Chemical Per-filter (for Acid): None
Chemical Per-filter (for Alkali): None
Chemical Per-filter (for Hydrocarbon): None
Side Maintenance: None
O2 Density control for N2 Load Lock: Yes
N2 Boat Shower Wafer Cooling: Yes
Fumace Temperature Controller: Model560A
Furnace Spec, Wafer/Carrier Handling
FOUP Maker / Model: ASYST/GEN3
Carrier Stage Capacity: 16
Info Pad A,B: None
Info Pad C,D: None
Fork Material: 1+4/ AI2O3(STD)
W/T Type: 1+4 Edge Grip
W/T Auto Teaching: No
Furnace Spec, Furnace Facilities
Furnace Exhaust Connection Point: Top Connection
Cooling Water Connection Point: Bottom Connection
RCU Duct Connection Point: N/A
Gas Spec, Gas Distribution System
IGS Type: IGS 1.5"W-seal rail-mount
IGS Maker: Fujikin
Tubing Bends: Bend (STD)
IGS Final Filter: MYKROLIS(Ni)
IGS Regulator: VERIFLO
IGS MFC Maker / Type: AERA
IGS Press. Transducer: NAGANO
Liquid Source Vapor System Maker / Model: None
Auto-Refill System Maker / Model: N/A
Auto-Refill System Provided By: N/A
Refill System Tubing Interconnect By: N/A
Ozone Delivery System Maker / Model: None
Ozone Delivery System Provider: N/A
Extemal Torch Unit: N/A
Water Vapor Generator (WVG): N/A
PAC: None
Gas Spec, Gas Facilities
Incoming Gas Connection Point: Bottom Connection
Gas Vent Connection Point: Bottom Connection
Exhaust Vent Connection Point: Top Connection
Gas Unit Exh. Connection point: Bottom Connection
Process Gas Exhaust connection point: Bottom Connection
Exhaust Specificationbution
Vacuum Gage - Press Ctrl: MYKROLIS
Vacuum Gage - Press Monitor (133kPa): MYKROLIS
Vacuum Gage - Pump Monitor: MYKROLIS
Main Valve: CKD Combination valve
Pump Maker / Model: EDWARDS/IH1800 (30000L/min)
Pump Provided by: Customer
Abatement System Type: Buming Type
Abatement System Maker / Model: OSC 1862WA (thermal wet)
Abatement System Provided by: Customer
N2 Dilution Unit Provided by: Gas cabinet exhaust
Pump Power: Facility provide
Pump Control Unit Steeing Location:
Pump-FNC Vacuum Piping Provided By: Customer
Reactor Specification
SiC Vendor Requirement: N/A
Liner Tube(AP): N/A
Process Tube(AP,AP+Sub-AP): N/A
Outer/Inner Tube Material (LP): Ouartz / Quartz
Inner Tube Type (LP): Reduce
Inner T/C: Outer Tube interior wall type (for CVD)
Tube Sealing: O-Ring
Manifold Heater: None
Switch Valve for Manifold Cooling Water: The reinforced cooling water is used
Soft Backfill Injector: Yes
Boat Type: 141Slots loader
Boat Material: SiC with CVD-Coat
Boat Rotation: Yes
Pedestal Type: Quartz+SiC
Cap Heater: Yes
Auto Shutter: Shutter Purge Type
Earthquake Countermeasure: N/A
Power Specification, Power dist System
Voltage 3phase: 480VAC
3phase connebtion type: Beaker Terminal
Voltage Single-phase: 120VAC
Single-phase connection type: Beaker Terminal
Frequency: 60Hz
Wattmeter Maler / Model: None
Control Power UPS provided by: Customer
Control Power UPS type: Fab-wide system
UPS Input Voltage / Output Voltage: N/A
Power Cable Input Entrance Location: Power Box Top
Power Specification, Cable Length
Wiring by: Customer
Conduit/Raceways provided by: Customer
Interface Specification, Factory Automation System
Host Communications: Comply with GJG
Equipment Host I/F Connection: Gas box top (OP)
Ingenio: Yes
OHT Capability: Yes
PIO I/F Location: FNC Top
PIO Provided by: TEL
PIO Maker /Model: Hokuyo / DMS-HB1-Z05
Carrier ID Reader Writer Type: RF
CIDRW Load Port: Read
CIDRW FIMS: Write
CIDRW Maker / Model: OMROM/V700-L21
CIDRW Provided by: TEL
EEC(Equipment Engineening Capability): None
Customized Management Signals(for WAVES): N/A
Interface Specification, User Interface
Signal Tower Model: LOUGWB-24-4
Signal Tower Colors (from the Top): Red/Blue/Yellow/Green
Signal Tower Location: Front / operation panel type
Front Operation Panel: Yes
MMI and Gas FlowChart: FPD & GFC installed
Indicator Type: Selete
Operator Switch: Operator Access/White Cover with Orange Light
Pressure Display Unit (Gas Inlet / Vacuum): MPa / Torr
Cabinet Exhaust Pressure Display Unit: Pa
Waming Label: English
Other Specification, Unit Location
Power Box: Sub-Fab
Pump: Sub-Fab
RCU: Yes
Other Specification, Gas Leak Detector
Gas Leak Detector: Yes
Gas Leak Detector Provided By: TEL
Gas Leak Detector Maker: Riken
Gas Detector Power: Power box
Damage/Missing parts list
Damage parts- PT1 N2 meter (PT1 N2錶頭), PT2 NH3 meter (PT2 NH3錶頭), monitor at backside of tool, system Fan1, Loadport 1 U/D driver
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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