Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC
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Metal CVD (Chemical Vapor Deposition)
Date of Manufacture: 2002-01-01
Currently Configured for: 200mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan City, Taiwan
Available date: Currently Available
UMC remarketing equipment not include pump / chiller and Heat exchanger.
Please inspect to confirm configuration and condition and missing or damaged parts.
Missing Chamber B & Chamber D.
General System Info
Equipment ID:TICL4-2
Serial Number:401387
Wafer Size (inches):8
Install Type:Stand Alone
Software Version:B4226
Is System On-Line? Yes
CE Mark Certified? Yes
Clean Room Manuals:No
Standard Manuals:No
OEM Audit Available? Yes
Decontamination Report Exists? Yes
Can Produce Wafers AS IS? Yes
Any Known Field Modifications? No
All Cables Present? Yes
Mainframe Type:Centura (Common)
System Configuration
Chamber / Process
Position A:CVD / TiN
Position B:CVD / TiN
Position C:CVD / Ti
Position D:CVD / Ti
Directory of Chamber Types for
TxZ, TixZ:MCVD
Multi-Slot Cooldown:Cooldown
Wafer Orienter:Orienter
Mainframe Items
Signal Lamp Tower:Yes
Loadlock Type :Wide body
Wafer Mapping:Fast
Wafer Slide Sensor:Yes
Bolt-On-SMIF:Yes
SMIF Loader Make/Model:ASYST/LPT2200
Robot Type:HP+
Blade Type:Quartz
Transfer Lid Hoist:No
Wafer on Blade Sensor:OTF
SBC Version:V452
Remote Service Monitors:No
GEMS:No
RF Generator Details
Chamber Position :Mfgr. / Model
Position A :AE / PDX 900-2V
Position B: AE / PDX 900-2V
Position C:AE / PDX 900-2V
Position D:AE / PDX 900-2V
Dep Chamber Roughing Pumps
Dep Chamber Pump
Manufacturer:Edward
Model:iH600
Quantity Required:4
Included With System:No
Load Lock Pump
Manufacturer:Edward
Model:iH80
Included With System:No
Transfer Chamber Pump
Manufacturer:Edward
Model:iH80
Included With System:No
AMAT Heat Exchanger
Model:Steelhead
Quantity Required:2
Included With System:No
Gas Box Configuration
Gas Delivery Type:SLD
Gas Panel Interface Type:Standard
Gas Panel Exhaust:Top
Liquid Delivery Type:TICL4
Gas Box Configuration
Gas Line # Gas / Flow (sccm) / MFC Mfgr. / MFC Model
1 Ar / 1000 / STEC / SEC4400M
2 N2 / 1000 / STEC / SEC4400M
3 H2 / 5000 / STEC / SEC4400M
4 Ar / 10000 / STEC / SEC4400M
5 Cl2 / 500 / STEC / SEC4400M
6 Ar / 1000 / STEC / SEC4400M
7 He / 3000 / STEC / SEC4400M
8 NH3 / 1000 / STEC / SEC4400M
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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