Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
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Date of Manufacture: 2007-07-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
ME ID# 17723 TNITL18000 (TEL)TELFORMULA Nitride tool config
Tool config is based on original PO, please verify tool details at tool inspection
OEM: TEL
Tool Model: FORMULA
Software Version (include revision #): V2.12 Rev.005
System Power Rating: Phase 3, 480 Vac, 50/60 Hz
Loading Configuration: 2 loadport
Retrofit Part Type 1: NA
Retrofit Remark 3
Chamber Name 1: 1
Chamber 1 Description: Funace
Chamber 1 Chemicals Gases Used: N2/SIH2CL2/NH3/HF/20%F2N2/N2O
Not Sold with Tool Description 1: power box fan
Not Sold with Tool Missing Qty 1: 1
N2 Load Port Exists 1: No
N2 OEM Stage Available 1: No
N2 Load Port Exists 2: No
N2 OEM Stage Available 2: No
Optional Gas 1: NA
Heater type: VCM-50-012L
Power cable length is 25m
Damage/Missing parts list
Damage parts: Power box fan. Board & Exhaust pipe
Swap parts: MFC board / DIO board (unable to confirm condition)
For TEL Furnace- Pressure Gauge, Exhaust controller, Quartz, Dry pumps, SHTC parts an customer provided items not included on tool sales
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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