Macquarie Semiconductor and Technology on behalf of 4Tex GmbH

SEZ Group SP203

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Asset ID: 215743

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SEZ Group

SP203

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2011-01-01

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: 9500 Villach, Austria

Available date: Currently Available

Vintage 2011, this system has already undergone extensive refurbishment

Included:

  • FFU
  • RDM (installed but can be removed)
  • Exhaust Up
  • Ultrasonic Flowmeter
  • 5 x Lauda Heat Exchanger (=max possible)
  • Standard Handling 200mm
  • N2 / DI included in Med Arm
  • Standard Pin Chuck 200mm (NC type)
  • Open Cassette
  • Shutter
  • Front and Rear Keyboard & Display
  • 3xCDS Type “E” including RAID controller
  • 400V AC
  • Transformator if needed

System refurbishment will include (4 weeks ARO) final testing at 4-tex location


* Chuckdrive / Elevating unit bearings & motors & toothed belts

* robot controller ESC200

* Brooks robot ATM407B

* ECO Gripper moving parts

* Lauda heat exchangers

* Ionizer spikes

* Chuck Pins

* some CAN bus modules

* Keyboard and KVM switch

* partly chemical valves

* SW backup Main Unit & CDS included


  • Limited 6 months warranty on exchanged parts and workmanship,
  • Customer specific options possible (for example other type of handling, different chuck, chamber,….)
  • Install support also possible.

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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