Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC
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Date of Manufacture: 2003-01-01
Currently Configured for: 200mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hsinchu, Taiwan
Available date: Currently Available
UMC remarketing equipment not include pump / chiller and Heat exchanger.
Please inspect to confirm configuration and condition and missing or damaged parts.
General System Info
Fab Equipment ID:M1PWI03
Serial Number:T223
Wafer Size (inches):8
Is System On-Line? Yes
Can Produce Wafers As-Is ? Yes
Any Field Modifications ? NO
All Cables present ? YES
Any Corrosion visible on modules ? NO
Any Missing / Damaged Parts ? NO
Shipping Brackets Included ? YES
Interface Type:Integrated SMIF
# of Cassette / FOUP Loaders:2
Load-Port Make / Model (#1):LPT 2200
Load-Port Make / Model (#2):LPT 2200
Robot Make / Model
ex: Yaskawa XU-RC400-B03:ASYST
End-Effecter Type:1 ROBOT
Pre-Aligner ? Yes
Mini-Environment ? Yes
Handler Options ? NO
OHT (300mm only) ? No
Communication Interface
GEM / SECS I / II ? SECS i
HSMS YES
System Software
System SW (OS) version:SUM OS5.8
System SW (App) version:V6.81
Review Microscope
Objectives:2.5 / 5X / 10X/20X/50X
Bright-field (BF) Options:BF
Dark-field (DF) Options:DF
Review Head Type:OLYMPUS
Facility Requirements
CDA: YES
Vacuum (House / Pump): HOUSE
Power :208 AC 3 PH
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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