Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2007-02-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Software
HMI/ Human / Machine Interface :11.5
PLC 1/ Main PLC controller :7.22
PLC 2/ Load / Unload :7.73
PLC 3/ Transfer :7.77
PLC 4/ Cleaner Modules :10.4
PLC 5/ Polisher A :7.61
PLC 6/ Polisher B :7.61
PLC 7/ Polisher C :7.61
PLC 8/ Polisher D :7.61
PLC9/ Option chemical :7.04
ITM PC/ NOVA 3060 :7.07
ME-20/ ME-20 :none
NOVA Interface software/ Via File Server :none
Block Controller/ Incorporated into HMI PC. :10.5
Interface requirements
HMI USB Ports/ Capable of recipe/data storage and retrieval :HMI USB Ports
Factory Interface
Frame Configuration/ Metro ready right side of mini-environment :NONE
WIP Delivery Type/ OHT or manual delivery :OHT or manual
E84 PI O Sensors and Cables/ UPPER E84 Sensors & Cables, with E87 compliance :UPPER E84 Sensors & Cables
Load Port Types/ Semi Compliant MENV and FIMS Assmeblies :ASYST Iso port
Platen A
Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm
Platen End point/ RECM & Friction :NA
Slurry Delivery/ CLC delivery type :Asahi
Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes
Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes
Platen B
Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm
Platen End point/ RECM & Friction :NA
Slurry Delivery/ CLC delivery type :Asahi
Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes
Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes
Platen C
Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm
Platen End point/ RECM & Friction :NA
Slurry Delivery/ CLC delivery :Asahi
Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes
Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes
Platen D
Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm
Platen End point/ RECM & Friction :NA
Slurry Delivery/ CLC delivery type :Asahi
Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes
Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes
Polisher
Polishing Head/ 300mm AI Head Generation II :300MM AI Head Generation II
Pad Wafer Loss Sensor/ Laser type :Laser type
Atomizer/Spray Bar/ Ebara to provide bracket and atomizer bar. :Atomizer
Cleaner Module
Special Chemical/ Single chemical bulk line that will service all modules. :yes
Cleaner Module 1
Roll Roll Cleaner Type/ Roll Brush :Roll Brush
Chemical 1 Upper Control Valve/ CLC :CLC
Chemical 1 Lower Control Valve/ CLC :CLC
Chemical 1 Upper Flow Meter/ CLC :CLC
Chemical 1 Lower Flow Meter/ CLC :CLC
Special Chemical Upper/ Air operation valve :yes
Special Chemical Lower/ Air operation valve :yes
Special Chemical Upper/ Flow Meter with user configurable alarm settings. :yes
Special Chemical Lower/ Flow Meter with user configurable alarm settings. :yes
Megasonic/ Nozzle :Nozzle
Bevel Edge Cleaning/ Yes :yes
Cleaner Module 2
Roll Roll Cleaner Type/ Roll Brush :Roll Brush
Chemical 2 Upper Control Valve/ CLC :CLC
Chemical 2 Lower Control Valve/ CLC :CLC
Chemical 2 Upper Flow Meter/ CLC :CLC
Chemical 2 Lower Flow Meter/ CLC :CLC
Special Chemical Upper/ Air operation valve :yes
Special Chemical Lower/ Air operation valve :yes
Special Chemical Upper/ Flow Meter with user configurable alarm settings. :yes
Special Chemical Lower/ Flow Meter with user configurable alarm settings. :yes
Megasonic/ Nozzle :Nozzle
Bevel Edge Cleaning/ No :N/A
Cleaner Module 3
Roll Roll Cleaner Type/ Roll Brush :Roll Brush
Chemical 1 Upper Control Valve/ CLC :CLC
Chemical 1 Lower Control Valve/ CLC :CLC
Chemical 1 Upper Flow Meter/ CLC :CLC
Chemical 1 Lower Flow Meter/ CLC :CLC
Special Chemical Upper/ Air operation valve :yes
Special Chemical Lower/ Air operation valve :yes
Special Chemical Upper/ Flow Meter with user configurable alarm settings. :yes
Special Chemical Lower/ Flow Meter with user configurable alarm settings. :yes
Megasonic/ No :N/A
Bevel Edge Cleaning/ No :N/A
SRD
Spin Rinse Dryer/ Yes :yes
Facilities
Chemical Connection/ Bottom :Bottom
Exhaust Connection/ Top :Top
Gas Connection/ Bottom :Bottom
Drain Connection/ Bottom :Bottom
Chiller/ Communication interface :Communication interface
NOVA
Measurement/ NOVA_3060 :NOAV_3060
Damage/Missing parts list
Damage-COVER(1) Chemical box cover C-3112-003-0001: Qty 3
Damage-COVER(2) Utility box cover C-3112-002-0001: Qty 3
Damage-COVER PLATE (CHB atomizer box) C-3537-973-0001: Qty 1
Damage-COVER PLATE (CHC atomizer box) C-3537-973-0001: Qty 1
Damage-DIW GUN CASE (R SIDE) C-3131-165-0001: Qty 1
Damage-DIW GUN CASE (L SIDE) C-3131-110-0001: Qty 1
Damage-CHA&C Top ring cover Front cover (Upper) C-3111-816-0001: Qty 2
Damage-CHB&D Top ring cover Front cover (Upper) C-3111-975-0001: Qty 2
Damage-TT cover(A,C) C-3111-743-0001 SIDE COVER(1): Qty 2
Damage-TT cover(B,D) C-3111-744-0001 SIDE COVER(2): Qty 2
Damage-2F Cleaner CLTP Cover(Front), C-3112-033-0001, COVER(2): Qty 1
Damage-2F Cleaner CLTP Cover(Front), C-3112-034-0001, COVER(2L): Qty 1
Damage-2F Cleaner CLTP Cover(TOP), C-3112-038-0001, COVER(4): Qty 1
Damage-2F Cleaner CLTP Cover(TOP), C-3112-037-0001, COVER(4L): Qty 1
Damage-TOP RING ROTATION DRIVER: Qty 2
Damage-TOP RING SWING DRIVER: Qty 2
Damage-Cleaner chemical CLC: Qty 1
Damage-SGDS-01A32A C-5102-065-0001 : Qty 3
Damage-NOVA_3060: Qty 1
Missing IW GUN: Qty 4
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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