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P-5000 Mark II DLH Delta PECVD Silane
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 1991-04-10
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Haltom City, United States
Available date: Currently Available
Software: b6.02
MF: P5000 Mark II
Qty 3 - DLH Delta PECVD Silane: Silane Oxide Deposition
Dual Frequency RF
Chuck: Anodized Aluminum
MFCs: 24 Horiba Z500 Digital MFCs
Robot: ROBOT ASSY 8 IN AMAT 5000
Dry Pumps:
3 Edwards IQDP80/QMB250 stacks, 1 IQDP80
Chillers:
AMAT Heatex 1
Edwards Atlas Abatement
Upgrades:
RFS,Brooks Digital Baratrons Qty 3, V440 SBC
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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