Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2010-12-22
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1304395
Micron MISTI/LID #: KISDBCNB00
Vendor Tool Serial #: T2DC6-14554
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: HIKE
Tool Model: Q2LN
System Power Rating: 208V/480V
Loading Configuration: 5 Lots
Retrofit Part Type 1: NA
Chamber Name 1: 1
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
Optional Gas 1: NA
• Currently configured for 300mm (12”) wafer sizes
• MFG Date: TBD
• Idle Date: 6/30/2013
• Model: DJ-1206VN-DF
• Process Application: Poly
• Hardware Config:
o Options:
? Cartridge heater: (1) HIKE RHC2 Heater
? TC, Heater Control: (5) Hitachi Kokusai
? TC, Over-temperature: (5) Hitachi Kokusai
? 5-P T/C, Cascade: (1) Hitachi Kokusai (5-P T/C for Cascade Control for 2 Boat System)
? 1-P T/C, Profile: (1) Hitachi Kokusai 1-P T/C for Profile Control
? SCR Unit Model: (1) EICH SKKT160L5Z4F-HKD
? Clean Unit 1 Model: (1) Panasonic BV-R14TF2G1H
? Clean Unit 2 Model: (1) Panasonic BV-R09TF2G1L
? Clean Unit 3 Model: (1) Hitachi PCF-4EKD3750
? Clean Unit 4 Model: (1) Hitachi PCF-8EKD3796
? I/O Shutter: (1) Hitachi Kokusai
? Stage: (1) Hitachi Kokusai AGV/PGV/OHT STAGE
? FOUP Loader: (1) Hitachi Kokusai
? FOUP Storage: (1) Hitachi Kokusai, FOUP recipe #: 16
? FOUP Opener: (1) Hitachi Kokusai, (2) ports
? Wafer Detection: (2) Omron, 25 in 1 lot
? Wafer Transfer: (1) Hitachi Kokusai Lift transfer
? Wafer Pitch Converter: (1) Hitachi Kokusai variable wafer pitch convertor
? Boat Elevator: (1) Hitachi Kokusai
? Boat Changer: (1) Hitachi Kokusai
? Furnace Port Shutter: (1) Hitachi Kokusai
? Boat Rotation: (1) EKK Boat Rotation w/N2 purge - for 2 Boat System
? Flange-Upper: (1) Hitachi Kokusai
? Flange-Lower: (1) Hitachi Kokusai
o Process Kit:
? Boat: (2) Hitachi Kokusai (143 Slot, Materia: Quartz)
? Outer Tube: (1) Hitachi Kokusai (Materia: Quartz)
? Inner Tube: (1) Hitachi Kokusai (Materia: Quartz)
? Adiabatic Plate: (32) Hitachi Kokusai (Materia: Quartz)
? Quartz Nozzle-1: (1) Hitachi Kokusai (N2, SI2H6, SiH4, PH3, ClF3)
? Quartz Nozzle-2: (1) Hitachi Kokusai (N2, PH3, ClF3)
? Quartz Nozzle-3: (1) Hitachi Kokusai (N2, SiH4, PH3, ClF3)
? Quartz-Nozzle-4: (1) Hitachi Kokusai (N2, SiH4, PH3, ClF3)
? Quartz-Nozzle-5: (1) Hitachi Kokusai (N2, PH3, ClF3)
? Quartz Nozzle-6: (2) Hitachi Kokusai (N2, ClF3)
? Quartz Nozzle-7: (1) Hitachi Kokusai (N2)
? Boat Fixing Ring: (2) Hitachi Kokusai
? Boat Base: (2) Hitachi Kokusai
? Quartz Shutter Plate: (1) Hitachi Kokusai
o Gas System:
? Gas Unit (IGS): (1) CKD
? Tape Heater, Gas Pipe1: (8) Hitachi Kokusai (100V, 140W)
? Tape Heater, Gas Pipe2: (3) Hitachi Kokusai (100V, 260W)
? Diffuser: (1) Hitachi Kokusai
? Mass Flow Controller: (16) Horiba-Stec SEC-Z500 Series
? Filters: (11) Entegris WGSLS Series
? Regulators: (5) CKD PGM Series
? Pressure Gauges: (6) Nagano Keiki ZT16-S01 & AM-215A-2A-71
? Manual valves: (7) CKD MMGD5-11D-W-KA
? Check Valve-1: (4) CKD MCGP5-F1X1-023-KA
? Check Valve-2: (1) CKD MCGP5-F2X1-023-KA
? Check Valve-3: (2) CKD MCGP5-01D-W-023-KA
? Needle Valve: (9) CKD MMGD5-11D-W Series
? Air Valve: (38) CKD MAGD5 Series
? Gases (SLM):
• #1: N2 (30), #2: N2 (1), #3: N2 (1), #4: SiH4 (4), #5: SiH4 (1), #6: SiH4 (.1),
• #7: SiH4 (.1), #8: PH3 (.5) / N2 (5%) – (.3), #9: PH3 (.5) / N2 (5%) – (.03)
• #10: PH3 (.5) / N2 (5%) – (.03), #11: PH3 (.5) / N2 (5%) – (.03)
• #12: PH3 (.5) / N2 (5%) – (.03), #13: N2 (5), #14: ClF3 (5), #15: N2 (3), #16: Si2H6(1)
o Exhaust System:
? Vacuum Sensor (VG11): (1) MKS 1000Torr
? Vacuum Sensor (VG14): (1) MKS 10Torr
? Vacuum Sensor (VG13): (1) MKS 2Torr
? Vacuum Sensor Monitor: (1) Copal
? Main Valve: (1) CKD VEC-SHA8-X0327
? Exhaust Piping: (1) HIKE One-Way Exhaust
? Exhaust Dilution Line: (1) HIKE One-Way Exhaust
? Reactor Tube Press Leak Line: (1) HIKE One-Way Exhaust
? Tape Heater, BG Line: (1) HIKE (Tape Hetaer, BG Line 40?)
? Jacket Heater, Exhaust Pipe: (1) MKS (Jacket Heater, Exhaust Pipe 150?)
? Baratron Calibration Port: (1) HIKE
? Inlet Flange Heater: (1) Shinwa ESH-13400-01
? Injector Port Heater: (21) HIKE
? Seal Cap Heater: (1) Shinwa ESH-13229,13237 - 2 Boat System
o Facility Interface:
? Power
? Gases
? Exhaust (to duct/House)
? Exhaust (to Pump)
? Process Cooling Water
? UPS Requirement: (1) Electrical connection point to controller to tie
facility supplied U
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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